JPH0376845B2 - - Google Patents

Info

Publication number
JPH0376845B2
JPH0376845B2 JP60167287A JP16728785A JPH0376845B2 JP H0376845 B2 JPH0376845 B2 JP H0376845B2 JP 60167287 A JP60167287 A JP 60167287A JP 16728785 A JP16728785 A JP 16728785A JP H0376845 B2 JPH0376845 B2 JP H0376845B2
Authority
JP
Japan
Prior art keywords
light
measured
polarization
electro
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60167287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227603A (ja
Inventor
Toshio Akatsu
Sadao Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60167287A priority Critical patent/JPS6227603A/ja
Publication of JPS6227603A publication Critical patent/JPS6227603A/ja
Publication of JPH0376845B2 publication Critical patent/JPH0376845B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP60167287A 1985-07-29 1985-07-29 変位の光学的測定装置 Granted JPS6227603A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60167287A JPS6227603A (ja) 1985-07-29 1985-07-29 変位の光学的測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60167287A JPS6227603A (ja) 1985-07-29 1985-07-29 変位の光学的測定装置

Publications (2)

Publication Number Publication Date
JPS6227603A JPS6227603A (ja) 1987-02-05
JPH0376845B2 true JPH0376845B2 (en]) 1991-12-06

Family

ID=15846955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60167287A Granted JPS6227603A (ja) 1985-07-29 1985-07-29 変位の光学的測定装置

Country Status (1)

Country Link
JP (1) JPS6227603A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2792657B2 (ja) * 1988-12-26 1998-09-03 浜松ホトニクス株式会社 走査型光学顕微鏡
JP3044880B2 (ja) * 1991-11-22 2000-05-22 トヨタ自動車株式会社 シリーズハイブリッド車の駆動制御装置
JPH0829128A (ja) * 1994-07-12 1996-02-02 Hitachi Ltd 物理量測定装置及びその測定器
JP4939765B2 (ja) 2005-03-28 2012-05-30 株式会社日立製作所 変位計測方法とその装置
JP5093220B2 (ja) * 2009-12-28 2012-12-12 株式会社日立製作所 変位計測方法とその装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972005A (ja) * 1982-10-18 1984-04-23 Nec Corp 光干渉型光フアイバセンサ
EP0112399B1 (de) * 1982-12-20 1987-03-11 Ibm Deutschland Gmbh Interferometrisches Messverfahren für Oberflächen
JPS60100002A (ja) * 1983-11-04 1985-06-03 Hitachi Cable Ltd 偏波面保存光フアイバを用いた光干渉計

Also Published As

Publication number Publication date
JPS6227603A (ja) 1987-02-05

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